The introduction of several new dielectric materials for high-speed ultra-large-scale integration (ULSI) microelectronics has increased the necessity for metrology tools to measure the ...

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A research team has solved a longstanding mystery surrounding strontium titanate, a metal oxide semiconductor, providing insight for future research on the material and its applications to electronic ...

Just as circuit metallization must evolve to manage resistance as features shrink, so must the dielectric half of the interconnect stack. For quite some time, manufacturers have needed a dielectric ...